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Clean Room and Shared Facilities

The CEPSR laboratories are expanding facilities that are currently used by approximately 100 researchers. The CEPSR labs are comprised of a Clean Room, and two neighboring laboratories that are referred to as the Shared Facilities.

Visit the Clean Room website.

The Clean Room currently consists of

  • Two Thermal Evaporators
  • a Sputter Deposition System
  • an E-Beam Evaporator
  • Two Reactive Ion Etching Units
  • a "Yellow Room" for Photolithography

Also related, but existing outside of the Clean Room is a Scanning Electron Microscope that is additionally used for E-Beam Lithography.

The Shared Facilities currently consist of:

  • an Atomic Force Microscope
  • an X-ray Diffractometer
  • an X-ray Photoelectron Spectrometer
  • a Spectroscopic Ellipsometer
  • an IR Spectrometer
  • a UV/Visible Spectrophotometer
  • a Probe Station.

Both the Clean Room and the Shared Facilities will continue to grow as more instrumentation and capabilities are added.

For more information regarding the Clean Room please contact Dick Harniman at x4-9831 or rjh2101@columbia.edu

For more information regarding the Shared Facilities please contact Eric Holihan at x4-0260 or eh2111@columbia.edu

© 2004 Columbia Center for Integrated Science & Engineering
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